Titanium disilicide

Titanium disilicide[1]
Names
IUPAC name
Titanium disilicide
Other names
Titanium silicide
Identifiers
CAS Number
  • 12039-83-7 checkY
3D model (JSmol)
  • Interactive image
ECHA InfoCard 100.031.719 Edit this at Wikidata
EC Number
  • 234-904-3
PubChem CID
  • 6336889
CompTox Dashboard (EPA)
  • DTXSID70894998 Edit this at Wikidata
InChI
  • InChI=1S/2Si.Ti
    Key: DFJQEGUNXWZVAH-UHFFFAOYSA-N
  • [Si]=[Ti]=[Si]
Properties
Chemical formula
 TiSi2
Molar mass 104.038 g/mol
Appearance black orthorhombic crystals
Density 4.02 g/cm3
Melting point 1,470 °C (2,680 °F; 1,740 K)
Solubility in water
 insoluble
Solubility soluble in HF
Hazards
GHS labelling:
Pictograms
 GHS02: FlammableGHS07: Exclamation mark
Warning
Hazard statements
 H228, H315, H319, H335
Precautionary statements
 P210, P240, P241, P261, P264, P271, P280, P302+P352, P304+P340, P305+P351+P338, P312, P321, P332+P313, P337+P313, P362, P370+P378, P403+P233, P405, P501
Safety data sheet (SDS) [1]
Related compounds
Other cations
 Zirconium disilicide
Hafnium disilicide
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Infobox references
Chemical compound

Titanium disilicide (TiSi2) is an inorganic chemical compound of titanium and silicon.

Preparation

Titanium disilicide can be obtained from the reaction between titanium or titanium hydride with silicon.[2]

Ti + 2 Si → TiSi2

It is also possible to prepare it aluminothermically by the ignition of aluminium powder, sulfur, silicon dioxide, and titanium dioxide or potassium hexafluorotitanate, K2TiF6, by electrolysis of a melt of potassium hexafluorotitanate and titanium dioxide, or by reaction of titanium with silicon tetrachloride.[2]

Another method is the reaction of titanium tetrachloride with silane, dichlorosilane or silicon.[3]

TiCl4 + 2 SiH4 → TiSi2 + 4 HCl + 2 H2
TiCl4 + 2 SiH2Cl2 + 2 H2 → TiSi2 + 8 HCl
TiCl4 + 3 Si → TiSi2 + SiCl4

Uses

Titanium silicide is used in the semiconductor industry. It is typically grown by means of salicide technology over silicon and polysilicon lines to reduce the sheet resistance of local transistors connections. In the microelectronic industry it is typically used in the C54 phase.

References

  1. ^ Lide, David R. (1998), Handbook of Chemistry and Physics (87 ed.), Boca Raton, Florida: CRC Press, pp. 4–91, ISBN 0-8493-0594-2
  2. ^ a b Brauer, Georg (1978). Handbuch der Präparativen Anorganischen Chemie, Band II. Baudler, Marianne (3rd ed.). Stuttgart: Enke. p. 1389. ISBN 978-3-432-87813-3. OCLC 310719490.
  3. ^ Pierson, Hugh O. (1999). Handbook of Chemical Vapor Deposition : Principles, Technology, and Applications (2nd ed.). Norwich, N.Y.: Noyes Publications. p. 331. ISBN 1-59124-030-1. OCLC 49708617.
  • v
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Titanium(II)
  • TiCl2
  • TiH2
  • TiBr2
  • TiI2
  • TiO
  • TiS
  • TiSi2
Organotitanium(II) compounds
[(C5H5)2Ti(CO)2]
Titanium(III)
  • TiAl
  • TiBr3
  • TiCl3
  • TiF3
  • TiI3
  • TiN
  • TiP
  • Ti2O3
  • Ti2S3
Organotitanium(III) compounds
[(C5H5)2TiCl]2
Titanium(IV)
  • TiB2
  • TiBr4
  • TiC
  • TiS(S2)
  • TiCl4
  • Ti(ClO4)4
  • TiF4
  • H2TiF6
  • TiH4
  • TiI4
  • TiOSO4
  • Ti(NMe2)4
  • Ti(NO3)4
  • TiO2
  • H4TiO4
  • Ti(C2H3O2)4
  • Ti4(OCH2CH3)16
  • Ti(OCH(CH3)2)4
  • Ti(OCH2CH2CH2CH3)4
  • KTiOPO4
  • NiO·Sb2O3·20TiO2
  • TiS2
  • TiSe2
  • TiSi2
  • Ti(C
    3    H
    5    O
    3    )
    4
Titanate compounds
  • BaTiO3
  • Ba2TiO4
  • Bi4Ti3O12
  • CaTiO3
  • CaCu3Ti4O12
  • CaZrTi2O7
  • Cs2TiO3
  • Dy2Ti2O7
  • EuBaTiO4
  • FeTiO3
  • Ho2Ti2O7
  • Li2TiO3
  • MnTiO3
  • Na2Ti3O7
  • Na0.5Bi0.5TiO3
  • Na2TiF6
  • K2TiF6
  • Li2TiF6
  • Rb2TiF6
  • NiTiO3
  • PbTiO3
  • Pb(Zr,Ti)O3
  • SrTiO3
  • ZnTiO3
Organotitanium(IV) compounds
  • [(C5H5)2TiCl2]
  • [(C5H5)2Ti(CH3)2]
  • [(C5H5)2TiS5]
  • [(C5H5)2Ti(μ-Cl)(μ-CH2)Al(CH3)2]
  • [(η5-C5H4-CH2C6H4OCH3)2TiCl2]
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Salts and covalent derivatives of the silicide ion
SiH4
+H 		He
LiSi Be2Si SiB3
SiB6
+B 		SiC
+C 		Si3N4
-N
+N 		SiO2 SiF4 Ne
NaSi Mg2Si Al Si4− SiP, SiP2
-P
+P 		SiS2
-S 		SiCl4 Ar
KSi CaSi
CaSi2 		ScSi Sc5Si3 Sc2Si3 Sc5Si4 TiSi
TiSi2 		V3Si V5Si3, V6Si5, VSi2, V6Si5 Cr3Si Cr5Si3, CrSi, CrSi2 MnSi, MnSi2, Mn9Si2, Mn3Si, Mn5Si3, Mn11Si9 FeSi2
FeSi
Fe5Si3
Fe2Si
Fe3Si 		CoSi, CoSi2, Co2Si, Co3Si NiSi, more… Cu17Si3, Cu56Si11, Cu5Si, Cu33Si7, Cu4Si, Cu19Si6, Cu3Si, Cu87Si13 Zn Ga GeSi
+Ge 		SiAs, SiAs2
-As
+As 		SiSe2 SiSe SiBr4 Kr
RbSi SrSi2 YSi Y5Si3, Y5Si4, Y3Si5, YSi1.4 ZrSi Zr5Si3, Zr5Si4, ZrSi2, Zr3Si2, Zr2Si, Zr3Si Nb4Si Nb5Si3 MoSi2
Mo3Si Mo5Si3 		Tc RuSi Ru2Si, Ru4Si3, Ru2Si3 RhSi Rh2Si, Rh5Si3, Rh3Si2, Rh20Si13 PdSi Pd5Si, Pd9Si2, Pd3Si, Pd2Si Ag Cd In Sn Sb TeSi2 Te2Si3 SiI4 Xe
CsSi Ba2Si BaSi2, Ba5Si3 Ba3Si4 * Lu5Si3 HfSi Hf2Si, Hf3Si2, Hf5Si4, HfSi2 Ta9Si2, Ta3Si, Ta5Si3 WSi2 W5Si3 ReSi Re2Si, ReSi1.8 Re5Si3 OsSi IrSi PtSi Au Hg Tl Pb Bi Po At Rn
Fr Ra ** Lr Rf Db Sg Bh Hs Mt Ds Rg Cn Nh Fl Mc Lv Ts Og
 
* LaSi2 La5Si3, La3Si2, La5Si4, LaSi CeSi2 Ce5Si3, Ce3Si2, Ce5Si4, CeSi, Ce3Si5 PrSi2 Pr5Si3, Pr3Si2, Pr5Si4, PrSi NdSi Nd5Si3, Nd5Si4, Nd5Si3, Nd3Si4, Nd2Si3, NdSix Pm SmSi2 Sm5Si4, Sm5Si3, SmSi, Sm3Si5 Eu? GdSi2 Gd5Si3, Gd5Si4, GdSi TbSi2 SiTb, Si4Tb5, Si3Tb5 DySi2 DySi HoSi2 Ho5Si3, Ho5Si4, HoSi, Ho4Si5 ErSi2 Er5Si3, Er5Si4, ErSi Tm? YbSi Si1.8Yb, Si5Yb3, Si4Yb3, Si4Yb5, Si3Yb5
** Ac ThSi PaSi USi2 NpSi2 PuSi Am Cm Bk Cf Es Fm Md No